Sulphur hexafluoride

CAS Number



  • colourless and odourless gas
  • non-flammable
  • inert

Main sources

  • cleaning agents
  • etching gas (semi-conductor engineering)
  • insulating and extinguishing gas (medium/high-voltage engineering)
  • gas leak detectors
  • inert gas for magnesium extraction

Thresholds for the reporting requirement of facilities in accordance with Annex 2 PRTRO

(Ordinance on the Register relating to Pollutant Release and the Transfer of Waste and of Pollutants in Waste Water)

  • Air               50 kg/year
  • Water           -
  • Soil               -


  • not toxic to humans and animals in normally occurring concentrations
  • strongest known greenhouse gas (Global Warming Potential 22,800 greater than carbon dioxide)
  • very low concentrations in the atmosphere

    Further information

    Last modification 16.12.2016

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